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Piezoelectric materials are commonplace in modern devices, and the prevalence of these materials is poised to increase in the years to come. The majority of known piezoelectrics are oxide materials, due in part to the related themes of a legacy of ceramists building off of mineralogical crystallography and the relative simplicity of fabricating oxide specimens. However, diversification beyond oxides offers exciting opportunities to identify and develop new materials perhaps better suited for certain applications. Aluminum nitride (and recently, its Sc-modified derivative) is the only commercially integrated piezoelectric nitride in use today, although this is likely to change in the near future with increased use of high-throughput techniques for materials discovery and development. This review covers modern methods—both computational and experimental—that have been developed to explore chemical space for new materials with targeted characteristics. Here, the authors focus on the application of computational and high-throughput experimental approaches to discovering and optimizing piezoelectric nitride materials. While the focus of this review is on the search for and development of new piezoelectric nitrides, most of the research approaches discussed in this article are both chemistry- and application-agnostic. 

Abstract Ternary metal‐oxide material systems commonly crystallize in the perovskite crystal structure, which is utilized in numerous electronic applications. In contrast to oxides, there are no known nitride perovskites, likely due to the competition with oxidation, which makes the formation of pure nitride materials difficult and synthesis of oxynitride materials more common. While deposition of oxynitride perovskite thin films is important for many electronic applications, it is difficult to control oxygen and nitrogen stoichiometry. Lanthanum tungsten oxynitride (LaWN_3−δO_δ) thin films with varying La:W ratio are synthesized by combinatorial sputtering and characterized for their chemical composition, crystal structure, and microstructure. A three‐step synthesis method, which involves co‐sputtering, capping layer deposition, and rapid thermal annealing, is established for producing crystalline thin films while minimizing the oxygen content. Elemental depth profiling results show that the cation‐stoichiometric films contain approximately one oxygen for every five nitrogen (δ = 0.5). Synchrotron‐based diffraction indicates a tetragonal perovskite crystal structure. These results are discussed in terms of the perovskite tolerance factors, octahedral tilting, and bond valence. Overall, this synthesis and characterization is expected to pave the way toward future thin film property measurements of lanthanum tungsten oxynitrides and eventual synthesis of oxygen‐free nitride perovskites.